Major fabrication tools
1. Screen Printer
2. E-beam evaporator
3. Magnetron sputter
4. Spincoater 1
5. Spincoater 2
6. 3D Printer
7. RIE
8. Lithography system
9. Lithography system 2
10. Parylene depositor
11. Laser cutter
12. Wafer grinder
13. Wire cutter
14. Glove box
15. Flexible electronics printer
16. Ink Dispenser
17. Photonic sintering system
18. Mixer
19. Bonder and mass transfer
Major characterization tools
1. Particle size analyzer
2. Surface profiler
3. 3D microscope
4. Probe station
5. Strain/stress tester
6. Electronic testing station
7. Patch Clamp and DNA Sequencing System
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Overveiw
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已经建设生物医学柔性电子技术实验室。实验室包括了材料合成、器件加工、表征等功能分区,拥有万级、千级和百级超净间、材料合成与制备实验室、电子测试实验室、细胞间等。我们在柔性电子、打印电子和新型生物材料上开展研究工作,可进行全链条的研究。力争在将实验室建设成为特色鲜明的知名高水平开放性国际化实验室,实现柔性电子和生物传感器开发、测试、和实验的综合平台。
传统CMOS加工工艺:包括光刻、湿法刻蚀、干法刻蚀、电子束蒸镀和电阻热蒸镀。先进加工工艺:包括了喷墨打印机、光脉冲烧结系统和感光树脂3D打印机。
各类光学和荧光显微镜、紫外和可见光吸收光谱仪、各类电学测量仪器和高频测试设备。
We have built Biomedical Flexible Electronics Technology Laboraotry. This lab contains experimental and fabrication spaces in a cleanroom devided into three segaments with grades ranging from 100 to 10000. We will work on flexible electronics, printable electronics, and biomateirals. Our goal is to build a open, international, and high level laboratory with specialty in flexible electronics and biomedical sensors. Our lab offers capability including sensor design, fabrication, and testing.
- Fabrication capability in the lab includes
CMOS fabricaiton: lithography, wet etching, dry etching, ebeam vaporation, and thermal vaporation.Advanced manufacutring: Inkjet printing, photonic sintering, and photosensitive resion 3D printing.
- Testing capability in the lab includes
Various microscopies, UV-Vis absorption spectrograph, various electronic testing machines, and RF equipment.
主要加工设备 Major Fabrication Facilities
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Screen Printer |
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E-beam Evaporator |
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Magnetron Sputter |
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Spincoater 1 |
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Spincoater 2 |
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3D Printer |
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RIE |
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Lithography System |
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Lithography System 2 |
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Parylene Depositor |
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Laser Cutter |
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Wafer Grinder |
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Wire Cutter |
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GLove box |
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Flexible Electronics Printer |
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Ink Dispenser |
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Photonic Sintering System |
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Mixer |
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Bonder and mass transferm |
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主要表征设备 Major Characterization Facilities
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Particle Size Analyzer |
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Surface Profiler |
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3D Microscope |
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Probe Station |
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Strain/stress Tester |
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Electronic Testing Machines |
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Patch Clamp and DNA Sequencing System |
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